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CVD SILICON CARBIDE®
Solid,
high purity (>99.9995%) CVD SILICON CARBIDE® exhibits no
porosity and has superior chemical resistance, thermal conductivity (300 Wm-1K-1)
stiffness and polishability (<1 Angstroms RMS). CVD SILICON CARBIDE®
can be fabricated in near-net-shape configurations or in plate sizes up to
700mm x 700mm x 20mm. CVD SILICON CARBIDE® performs at high
temperatures (>1500oC) in inert and oxidizing environments with long life
cycles. In semiconductor, wear, optical and other "hot" applications,
CVD SILICON CARBIDE® is engineered to perform.
Background
Silicon Carbide has long been recognized as an ideal material
for applications where superior attributes such as hardness and stiffness,
strength at elevated temperatures, high thermal conductivity, low coefficient
of thermal expansion and resistance to wear and abrasion are of primary value.
Until recently, the only commercially available silicon carbide has been sintered
or reaction bonded hexagonal alpha silicon carbide. One issue design engineers
have had to contend with is the fact that the traditional powder consolidation
process produces two-phase materials, i.e., some reaction bonded SiC contains
as much as 40% free silicon. The "impurity" materials act to compromise
the true performance of the silicon carbide.
Summary
Description
Advanced Materials' CVD SILICON CARBIDE® is a unique free standing,
monolithic material with superior characteristics in terms of purity (>99.9995%),
homogeneity, chemical and oxidation resistance, cleanability, polishability
and thermal and dimensional stability. These superior properties are the result
of Advanced Materials' bulk chemical vapor deposition (CVD) process. More
than a coating, solid, cubic (beta) silicon carbide clearly offers performance
advantages over other SiC material produced by traditional (sintering or reaction
bonding) processes for applications including semiconductor processing equipment,
optics, wear parts and heat sinks for electronic packaging. Because this material
has a cubic beta structure, it offers isotropic characteristics. Hundreds
of tests conducted over the past several years confirm the material's homogeneity
- not only within a production run - but also from batch to batch. Advanced
Materials' company wide philosophy includes a commitment to provide exceptional
chemicals and materials. The extensive use of quality control techniques such
as SPC/SQC ensure that products of consistent quality are shipped to the customer.
Available Forms
Advanced Materials' CVD SILICON CARBIDE® material is available
as rough-cut blanks or as components which have been precision-machined to
your specifications. We are currently producing free standing CVD SILICON
CARBIDE® sheets up to 1.5 meters in length and 2.5 centimeters
thick. CVD SILICON CARBIDE® can also be grown as near-net-shape
parts in such popular geometries as cones, tubes, dome shapes and honeycomb
structures.
Applications
Advanced Materials' CVD SILICON CARBIDE® has been successfully
scaled to support numerous commercial applications in such industries as automotive,
semiconductor processing equipment, wear components such as pump seals, mirror
optics, information storage media, electronic packaging and many other markets
demanding high performance engineered ceramic parts.
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